Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs

The rising demand for mobile devices with photo cameras that has the same stability as that of a high-end camera has led to the need for introducing image stabilizing devices that must be inexpensive and efficient. This problem is often addressed using miniature Micro-Electro-Mechanical Sensors (MEMS). The application of resonance MEMS as inertial sensors in navigation systems of low accuracy grade is also relevant. Such devices are manufactured using well-developed microelectronic technologies of silicon processing to obtain layers up to 100 µm thick. Today, much attention is paid to the issues of a sensitive element development for a MEMS gyro with high sensitivity and a minimum possible size. This paper reports one such comb driven, single perforated proof mass MEMS-based Tuning-Fork Gyroscope (TFG) using PolyMUMPs process. In this paper, initially, a full description of design and simulation is done using predictive modelling methods. We propose a miniature perforated mass sized 500*500 µm, highly sensitive to the input signal, with small displacements along the axis of primary oscillations. The value of this work is that it considers a full cycle of a MEMS-based gyroscope’s design, starting from the mathematical model description and up to the study of a manufactured prototype.