Testing equipment for electronic device

PURPOSE: To provide a tape type probe which is used for testing pads of minute pitches on a chip. CONSTITUTION: The tape type probe 10 is a polymer tape 12 having a series of patterned probes and it is featured by having a series of metal patterns each equipped with leads 20 projecting to an opening part 22 of a polymer. End parts of the leads are so arranged as to meet input - output pads being tested. The tape type probe gives radial expansion from the pads of minute pitches on a chip being tested to rougher pitches in a testing machine. COPYRIGHT: (C)1992,JPO