Method for producing microelectromoulding metal mould

The microelectromolding metal mold making process belongs to the field of micro machine building technology. The microelectromolding metal mold making process includes the steps of: pre-treatment of mold base, making microelectromolding mother mold, microelectromolding, post-treatment and detection. The present invention adopts so-called 'no-back board growth process', in which micro structure pattern is electromolded directly on nickel substrate via ultraviolet irradiation on photoetching mask. During making microelectromolding mother mold, one seed layer is added between the SU-8 photoresist and the substrate; and in the post-treatment, vacuum annealing is adopted. The microelectromolding metal mold made in the method of the present invention has the merits of high side wall verticality and high surface smoothness. The present invention is suitable for fine machining of organic polymer, including plastic.