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Mass-spectrometric and kinetic study of Ni films MOCVD from bis-(ethylcyclopentadienyl) nickel
Mass-spectrometric and kinetic study of Ni films MOCVD from bis-(ethylcyclopentadienyl) nickel
2013
Protopopova
Alexandrov
Keywords:
Nuclear chemistry
mass spectrometric
Metalorganic vapour phase epitaxy
Nickel
Kinetic energy
Materials science
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