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Determination of the Model for the Chemical Structure of Porous PECVD Low-k Films
Determination of the Model for the Chemical Structure of Porous PECVD Low-k Films
2015
Patrick Verdonck
Quoc Toan Le
J. Devonport
Danilo R. Huanca
S. G. dos Santos Filho
T. Conard
J. Meersschaut
M. R. Baklanov
S. Van Elshocht
Keywords:
Chemical structure
Plasma-enhanced chemical vapor deposition
Porosity
Inorganic chemistry
Chemistry
Chemical engineering
Correction
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