Advanced SiC Power MOSFETs Manufactured on 150mm SiC Wafers

An advanced silicon carbide power MOSFET process was developed and implemented on a high-volume 150mm silicon production line. SiC power MOSFETs fabricated on this 150mm silicon production line were demonstrated with blocking voltage of 1700V with VGS=0V. These SiC MOSFETs have a specific on-resistance as low as 3.1 mΩ-cm2 at room temperature, increasing to 6.7 mΩ-cm2 at 175°C. Devices were packaged in TO-247 package and measured to have on-resistance of 45 mΩ with VGS=20V at room temperature. Clamped inductive switching characterization of these SiC MOSFETs shows turn-off losses as low as 110 uJ (700V, 19.5A). The high-temperature gate bias stability was characterized at positive (+20) and negative gate bias (-10V) at 175°C. After 750 hours of gate stress at a gate bias of VGS=+20V and 175°C, we observe less than a 250mV shift in the threshold voltage. After 750 hours of stress at VGS=-10V and 175°C, we characterize a threshold voltage shift less than 100mV. This shows promise for high-volume production of reliable SiC MOSFETs on 150mm wafers.