Old Web
English
Sign In
Acemap
>
Paper
>
Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical
Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical
2014
Wy Wang
Peng Jin
Gp Liu
W. Li
B. Liu
Xf Liu
Zg Wang
Keywords:
Thin film
Annealing (metallurgy)
Inorganic chemistry
Materials science
Composite material
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]