Vibration Influence Evaluation of a Resonant MEMS Scanning System for Automotive Lidars

This paper demonstrates a vibration test for an operating resonant MEMS scanning system to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64 % and 0.26 %, respectively, for 2 grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91 % and 0.15 % for y axis vibration, corresponding to 44.4 % and 43.0 % reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.