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High frequency bulk acoustic wave resonator using thinned monocrystalline lithium niobate
High frequency bulk acoustic wave resonator using thinned monocrystalline lithium niobate
2006
Gachon
Lengaigne
Benchabane
Majjad
Ballandras
Laude
Keywords:
Resonator
Fabrication
Monocrystalline silicon
bulk acoustic wave
Materials science
Acoustic wave
Optoelectronics
Lithium niobate
Correction
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