Developing High-Efficiency Zn2SiO4:Mn Thin-Film Phosphors for Flat-Panel Cathodoluminescent Displays

Abstract : Zn2SiO4:Mn thin films were produced and studied for their potential application as thin film phosphors for high-resolution flat-panel cathodoluminescent displays. Crystallized films with improved electrical conductivity were obtained after conventional and rapid thermal annealings in an N2 environment at 850 to 1100 deg C for 0.25 to 60 min. A maximum cathodoluminescent efficiency of 1.3 lm/W was achieved under dc excitation at 1500 V. The luminescent emission from these thin films peaked around 525 nm. The decay time of these films was controlled in the range of 2 to 10 ms by variation of the deposition and annealing parameters. Because their fast response time overcomes the long decay limitation of the Zn2SiO4:Mn powder phosphor, these thin films will be suitable for practical display applications.