AIS wavefront sensor: a robust optical test of exposure tools using localized wavefront curvature

We present an update of the AIS wavefront sensor, a diagnostic sensor set for insertion in the upgraded 0.5 NA SEMATECH Albany and Berkeley METs. AIS works by using offset monopole illumination to probe localized regions of the test optic pupil. Variations in curvature manifest as focus shifts, which are measured using a photodiode- based grating-on- grating contrast monitor, and the wavefront aberrations are reconstructed using a least-squares approach. We present results from an optical prototype of AIS demonstrating an accuracy of better than λ/30 rms for Zernike polynomials Z 4 through Z 10 . We also discuss integration strategies and requirements as well as specifications on system alignment.