The Beijing metal vapor vacuum arc ion source program

Work on metal vapor vacuum arc (MEVVA) ion source development was initiated at the Institute of Low Energy Nuclear Physics, Beijing Normal University, in 1988. MEVVA ion sources I, II, IIA, and III have been designed, fabricated, and tested, and an ion implantation facility with three MEVVA ion sources has been developed and is now undergoing testing. Here the status of the MEVVA ion source research and development program is described.