Old Web
English
Sign In
Acemap
>
Paper
>
3-D Self-assembled SOI MEMS: Fabrication and Numerical Simulation
3-D Self-assembled SOI MEMS: Fabrication and Numerical Simulation
2005
C. Mendez
Pascal De Vincenzo
I. Klapka
Véronique Rochus
François Iker
Nicolas André
Jean-Pierre Raskin
Keywords:
Silicon on insulator
Computer simulation
Fabrication
Materials science
Microelectromechanical systems
Electronic engineering
self assembled
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
1
References
0
Citations
NaN
KQI
[]