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Design, simulation, and fabrication of silicon-on-insulator MEMS vibratory decoupled gyroscope
Design, simulation, and fabrication of silicon-on-insulator MEMS vibratory decoupled gyroscope
2016
Payal Verma
Vladimir S. Pavelyev
B. O. Volodkin
K. N. Tukmakov
A.S. Reshetnikov
T. V. Andreeva
Sergey A. Fomchenkov
S. N. Khonina
Photonics” Ras, Molodogvardeyskaya , , Samara, Russia
Keywords:
Silicon on insulator
Vibrating structure gyroscope
Microelectromechanical systems
Gyroscope
Materials science
Electronic engineering
Optoelectronics
Fabrication
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