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Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching
Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching
2004
Robert T. Bondokov
Naveen Tipirneni
Dimitri I. Cherednichenko
Tangali S. Sudarshan
Keywords:
Etching
Composite material
Metallurgy
Hydrogen
Materials science
surface preparation
hydrogen etching
Correction
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