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Post Exposure Delay Considerations in a 193-nm Chemically Amplified Resist
Post Exposure Delay Considerations in a 193-nm Chemically Amplified Resist
2001
Y. M. Lee
M. G. Sung
E.-M. Lee
Y. S. Sohn
Ilsin An
H-K Oh
Keywords:
Materials science
post exposure
Optoelectronics
Resist
Correction
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