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Thin film forming method, and a semiconductor substrate and an electronic device manufactured by using the same
Thin film forming method, and a semiconductor substrate and an electronic device manufactured by using the same
2013
higasi seiitirou
seiitirou higasi
kouhei syuti
yositaka kobayasi
syougo nakamura
muneki akazawa
Keywords:
Thin film
Optoelectronics
Substrate (electronics)
Materials science
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