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A Study on the Removel of Metallic Impurities on Silicon Surface and Mechanism using Remote Hydrogen Plasma
A Study on the Removel of Metallic Impurities on Silicon Surface and Mechanism using Remote Hydrogen Plasma
1996
Myeong-Gu Park
Tae-Hang An
Jong-Mu Lee
Hyeong-Tak Jeon
Geun-Geol Ryu
Keywords:
Plasma
Metallurgy
Materials science
Impurity
Inorganic chemistry
Metal
Silicon
metallic impurities
Correction
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