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A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams
A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams
1995
Makoto Akizuki
Jiro Matsuo
S. Ogasawara
Mitsuaki Harada
Atsumasa Doi
Isao Yamada
Keywords:
Atomic physics
Beam (structure)
Ion
Chemistry
Correction
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