Electrical and photo luminescence properties of ZnSe epitaxial layers grown on GaAs (100) by atmospheric pressure MOVPE: the role of substrate temperature

Epitaxial layers of ZnSe ranging in thickness from 5μm to 30 μm have been grown on GaAs (100) substrates over the temperature range 240° C to 340° C by atmospheric pressure MOVPE employing dimethylzinc and hydrogen selenide. An optimum growth temperature of 280 ± 5° C has been identified and when grown at this temperature the ZnSe epitaxial layers exhibit low resistivity (ρ298 K ≤ 10 ohm · cm), a low compensation ratio (θ298 K = 0.27), a carrier mobility (μ298 K) of 250 ±10 cm2V-1s-1) and aren-type (n 298 K = 8.0 × 1014 cm-3). The ratio of photoluminescence intensity measured at 298K and at 12 K is high (104) and is dominated by a sharp emission due to excitons bound to neutral donors at 2.7956 eV. Mass spectrometric investigations of the chemical reactions occurring inside the reactor in the presence of the GaAs substrate indicate significant surface-controlled reactivity in the region of 280° C.