Transceiver-balancing wide band combination type ultrasonic transducer surface array probe and production method thereof

The invention discloses a transceiver-balancing wide band combination type ultrasonic transducer surface array probe which comprises a silicon substrate (1). An oxidation layer (2) is arranged on the upper surface of the silicon substrate (1), a plurality of cavities 93) are formed in the upper surface of the oxidation layer (2) and are arranged in rows and columns, a vibration membrane (4) is bonded on the upper surface of the oxidation layer (2), an isolation layer (5) is arranged on the upper surface of the vibration membrane (4), sinking isolation grooves (6) are formed around the inside and peripheral edge of the isolation layer (6), and the isolation grooves (6) penetrate the isolation layer (5) and the vibration membrane (4) with bottoms formed in the oxidation layer (2); electrodes (7) are arranged at central positions rightly facing to the cavities (3) on the upper surface of the isolation layer (5). The transceiver-balancing wide band combination type ultrasonic transducer surface array probe is novel in structure, small in size, wide in band, high in flexibility, low in nose, good in stability and balancing in transceiving performance.