The field emission device
2010
In the field emission device, relates to an electron beam trajectory is emitted, to eliminate or reduce the spherical aberration factor from fundamental place. At the level lower than the extraction gate electrode 13, providing the aberration suppression electrode 31 for exposing the opening inner peripheral edge 31e at a position closer to the emitter tip 11Tp. The height position of the opening inner peripheral edge 31e of the aberration suppression electrode 31 is lower than the height position of the tip of the emitter 11Tp. The aberration suppression electrode 31, a voltage lower than the potential of the emitter 11, applying a aberration suppressed voltage Vsp to control so as to parallel the equipotential lines of the emitter tip 11tp vicinity.
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