Completely Integrated Contact-Type a-Si/a-SiC Heterojunction Image Sensor with Poly-Si TFT Drivers

This paper describes the performance of both an 8 dots/mm and a 400 DPI contact-type linear image sensors which integrate poly-Si TFT scanning circuits and a-Si/a-SiC heterojunction photodiodes on the same substrate. Each of these image sensors provides excellent cost and performance for their applications. In particular, the 400 DPI image sensor has achieved a higher scanning speed of 1 msec/line by using the integrated scanning circuits with hydrogenated poly-Si TFTs having high carrier mobility.