CLOSED-END NANOCHANNELS: MODEL PLATFORM FOR NANOFLUIDIC FLOWS

This paper reports quantitative measurements and theoretical models of capillary filling and evaporation within closed-end 45 nm thick nanochannels of different lengths. For capillary filling, two stages are clearly identified. Gas dissolution, usually neglected at macro- or even micrometer scale, has to be taken into account. Evaporation experiments are consistent with a diffusion-based model. The geometry presented here, i.e. closed-end silicon-glass nanoslits, is shown to be a versatile platform for studies on flows and capillarity-related phenomena at the nanoscale.