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Resist stripping for advanced FEOL nodes : improvements to process based on ozone diffusion by use of additives
Resist stripping for advanced FEOL nodes : improvements to process based on ozone diffusion by use of additives
2005
O. Louveau
E. Lajoinie
Olivier Pollet
Jean Philippe Odet
Sylviane Cetre
Laurent Lachal
Beatrice Icard
Evelyne Tabouret
M. Veillerot
Hervé Fontaine
D. Louis
Keywords:
Stripping (chemistry)
Environmental chemistry
Resist
Ozone
Materials science
Metallurgy
Correction
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