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Piezoelectric Characterization of Epitaxial Pb(Zr 0.52 , Ti 0.48 )O 3 Thin Films on Flexible Printed Circuit
Piezoelectric Characterization of Epitaxial Pb(Zr 0.52 , Ti 0.48 )O 3 Thin Films on Flexible Printed Circuit
2021
Tomofumi Mizuyama
Norimitsu Hirosaki
Tsutomu Nishigaki
Hiroaki Nishikawa
Keywords:
Materials science
Piezoelectricity
Thin film
Pb(Zr(0.52)Ti(0.48))O(3)
Flexible electronics
epitaxial thin film
Epitaxy
Optoelectronics
characterization
Correction
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