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A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides
A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides
2003
M. Dijkstra
Elzakker van G
G.C.F. Venhorst
Hugo Hoekstra
Paul Lambeck
Ridder de Rene M
G. Altena
Rommert Dekker
Keywords:
Silicon nitride
Waveguide (optics)
Simulation
Engineering
Insertion loss
Microelectromechanical systems
Optoelectronics
Correction
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