The pressure sensor module, and a pressure sensing device

2005 
Forming a holding space 34 between the diaphragm 22 and the thin film layer 31, and the vent hole 321 communicates with the outside of the first case in the holding space 34 is provided. Thus, as the detected fluid, for example, when using a corrosive gas or chemical solution, even corrosive gas component of the detected fluid is passed through the holding space 34, the corrosion transmitted from the vent hole 321 to the outside of the case It can ventilate the sex gas component body. Therefore, it is possible to prevent corrosion of the diaphragm 22 by the detected fluid, thereby the life of the pressure sensor module 2.
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