Investigation of quantum efficiency of A3B5 laser heterostructure after FIB milling

M I Mitrofanov,V P Evtikhiev

Investigation of quantum efficiency of A3B5 laser heterostructure after FIB milling

2016

M I Mitrofanov
V P Evtikhiev

Al-containing layers oxidization was eliminated using UHV FIB system and thus, only ion implantation and amorphisation influence on quantum efficiency of A3B5 laser heterostructures should be investigated.

Keywords:

Heterojunction
Ion implantation
Quantum efficiency
Laser
Analytical chemistry
Materials science
Optoelectronics

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