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711 Wear Behavior of Cutting Edge in Fixed Alumina Abrasive Polishing Tool
711 Wear Behavior of Cutting Edge in Fixed Alumina Abrasive Polishing Tool
2015
Daijiro Nakayama
Ryunosuke Sato
Hideo Ueno
Keywords:
Abrasive
Chemical-mechanical planarization
Polishing
Wafer
Metallurgy
Composite material
Materials science
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