Minimizing Residues in Transfer of 2D Materials from PDMS

Integrating layered two-dimensional (2D) materials into 3D heterostructures offers opportunities for novel material functionalities and applications in electronics and photonics. In order to build the highest quality heterostructures, it is crucial to preserve the cleanliness of 2D material surfaces that come in contact with polymers such as PDMS during transfer. Here we show that a simple UV-ozone pre-cleaning of the PDMS surface before exfoliation significantly reduces organic residues on transferred MoS$_{2}$ flakes. An additional 200$^{\circ}$C vacuum anneal after transfer efficiently removes interfacial bubbles and wrinkles as well as accumulated strain, thereby restoring the surface morphology of transferred flakes to their native state. Our recipe is important for building clean heterostructures of 2D materials and increasing the reproducibility and reliability of 2D devices.