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New thick-film process based on screen-printing deposition for free-standing piezoelectric microsystems
New thick-film process based on screen-printing deposition for free-standing piezoelectric microsystems
2010
Claude Lucat
Hélène Debéda
Christophe Castille
Riadh Lakhmi
Isabelle Dufour
Keywords:
Screen printing
Microsystem
Composite material
Materials science
Piezoelectricity
Deposition (law)
Optoelectronics
Correction
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