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Compact Electrical Characterization of Nano-CMOS Transistor with 1.2nm Ultrathin Gate Dielectric
Compact Electrical Characterization of Nano-CMOS Transistor with 1.2nm Ultrathin Gate Dielectric
2003
Hee Sung Kang
Wu-yun Quan
Kyung-Soo Kim
Chang-bong Oh
Hyuk Ju Ryu
Chang-Ki Baek
Bomsoo Kim
Young-Wug Kim
Kwang Pyuk Suh
Dae M. Kim
Keywords:
Nanotechnology
Gate dielectric
Electronic engineering
Nano-
CMOS
Materials science
nano cmos
Transistor
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