Old Web
English
Sign In
Acemap
>
Paper
>
Semiconductor scaling via self-aligned block patterning
Semiconductor scaling via self-aligned block patterning
2016
Nihar Mohanty
Jeffrey S. Smith
Richard Farrell
Lior Huli
Cheryl Pereira
David Hetzer
Akiteru Ko
Anton DeVillers
Keywords:
Optoelectronics
Physics
Scaling
Semiconductor
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]