Very Thin Micromorph Tandem Solar Cells Deposited at Low Substrate Temperature

As an alternative to crystalline silicon or thin film solar cells on rigid glass substrates, we aim to fabricate amorphous silicon (a-Si)/nanocrystalline silicon (nc-Si) tandem thin film solar cells on cheap flexible substrates. We have chosen polycarbonate as the superstrate and adapted the a-Si and nc-Si deposition processes for deposition at a maximum temperature of 130°. Because a-Si deposited at low temperatures has a high band gap, we were able to fabricate very thin (<1.2 μm) a-Si/nc-Si solar cells, because the high band gap of the a-Si shifts the current generation more towards the bottom cell, allowing for a much thinner (900 nm) bottom cell. The somewhat lower Jsc of the complete cell is partly compensated by a higher Voc which results in an initial conversion efficiency of 9.5% for the low temperature tandem solar cells on glass.