Monte‐Carlo simulations of the point‐to‐point resolution in scanning Auger microscopy and x‐ray microanalysis of thin overlayers

The point-to-point resolution of Auger electron spectroscopy is compared to that of x-ray microanalysis of thin unsupported films and of thin films on a bulk material. Monte-Carlo calculations are used in this respect. The incident beam is a Gaussian-distributed curve with standard deviation σo = 40 A and an energy range 10–100 keV. A Point-Spread-Function describing the radial distribution of the analysed signal is, in each case, determined from the Monte-Carlo results. From this function and by using the Rayleigh criterion, the point-to-point resolution is calculated.