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Growth of corundum-type In 2 O 3 thin films with Ga 2 O 3 buffer layers by mist CVD method
Growth of corundum-type In 2 O 3 thin films with Ga 2 O 3 buffer layers by mist CVD method
2014
Yuta Suwa
Keywords:
Mist
Thin film
Corundum
Materials science
Inorganic chemistry
Chemical engineering
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