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Study of Agglomeration Behavior of Chemical Mechanical Polishing Slurry under Controlled Shear Environments
Study of Agglomeration Behavior of Chemical Mechanical Polishing Slurry under Controlled Shear Environments
2018
Aniruddh Khanna
Sushant Gupta
Purushottam Kumar
Feng-Chi Chang
Rajiv K. Singh
Keywords:
Chemistry
Shear (sheet metal)
Inorganic chemistry
Slurry
Chemical-mechanical planarization
Composite material
Economies of agglomeration
Metallurgy
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