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O 2p peak evolution and Si valence band change in plasma oxidation of Si(001)
O 2p peak evolution and Si valence band change in plasma oxidation of Si(001)
2017
Kazuho Morita
Sakura Takeda
Tatsuya Ebato
Yudai Higa
Akiho Fujinaka
Natsuki Morimoto
Masatoshi Yoneda
Artoni Kevin R. Ang
Xin Tan
Hiroshi Daimon
Keywords:
Angle-resolved photoemission spectroscopy
Condensed matter physics
Plasma
Valence band
Silicon
Chemistry
Materials science
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