Particle-induced X-ray emission of light elements

Abstract With an X-ray detector capable of measuring photons at an energy as low as 300 eV, it is possible to perform PIXE analysis of light elements. In combination with RBS the X-ray production of N, O and F as a function of the incident proton or He-ion energy can be quantified. The possibility of accurate quantitative analysis of low- Z materials is demonstrated. The fluorescence yields of N, O and F, that can be extracted from the measured X-ray production, are found to deviate from theory. The differences can be explained by the effects of chemical binding and multiple ionization on the physical processes involved in the particle-induced X-ray emission.