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Simulation on the effect of Halo implantation precision on the performance of 36NM NMOSFET device
Simulation on the effect of Halo implantation precision on the performance of 36NM NMOSFET device
2008
Qi Jianwen
Cheng Xiulan
Masayasu Tanjyo
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Computer science
Simulation
Halo
Correction
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