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Cross-Hatch Related Oxidation and Reliability of Gate Oxide of Strained-Si/SiGe
Cross-Hatch Related Oxidation and Reliability of Gate Oxide of Strained-Si/SiGe
2003
Mika Nishisaka
Tanemasa Asano
Keywords:
Nanotechnology
Gate oxide
Electronic engineering
Materials science
cross hatch
Optoelectronics
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