High-temperature ceramic base film thermocouple and manufacturing method thereof

The invention discloses a high-temperature ceramic base film thermocouple and a manufacturing method of the high-temperature ceramic base film thermocouple, and belongs to the field of sensor manufacturing technologies and high temperature measurement technologies. The high-temperature ceramic base film thermocouple sequentially comprises a ceramic base 1, a SiO2 layer 2, a first A12O3 layer 3, an interlayer 4, a second A12O3 layer 5, a thermocouple layer 6 and a third A12O3 layer 7. The high-temperature ceramic base film thermocouple has the advantages that (1) the SiO2 transition layer is adopted, so that binding force on the interface between an insulating layer and the ceramic base is enhanced; (2) the A12O3-Si3N4/A1N-A12O3 composite insulating layer is adopted, the excellent insulating performance is possessed, oxygen can be prevented from entering the high-temperature ceramic base film thermocouple, oxidization of a film on an inner layer is eliminated, and good dynamic response of a sensor is guaranteed; (3) thermal stress of the film caused by thermal loads is effectively reduced, and film forming quality and stability of the film are guaranteed.