High Sensitivity InAs DQW Linear Hybrid Hall ICs with InAs Deep Quantum Well Hall Elements

SUMMARY By electrically connecting and placing an InAs deep quantum well (DQW) Hall element as a magnetic sensor chip and an Si IC linear amplifier in a small plastic package, a very small InAs DQW linear hybrid Hall IC (InAs DQW LHHIC) with a high magnetic field sensitivity has been developed. The output voltage of the hybrid Hall IC showed a very small temperature coefficient of 0.02%/°C and the response time was very low, less than 3 μs. By using this InAs DQW LHHIC, practical current sensors with high sensitivity, high accuracy, and temperature stability have been developed.