Study on Fine Groove Milling of Microchannel Dies – Tool Bending in Milling of Micro-Grooves

Microchannel chips for use in micro total analysis systems have recently been attracting attention in the medical field. The photolithography technology employed in semiconductor manufacturing is generally used to manufacture microchannel chip dies. However, this technology involves several processes such as mask fabrication and application of a photoresist to a substrate as well as expensive clean room facilities. In light of this, this study examines ways to form a fine groove by using a micro-end mill. The relationship between the cutting conditions and the bending of a micro-end mill were experimentally examined. In addition, we calculated the tilt angle of the tool used in micro-groove milling on the basis of specific cutting force and tool stiffness.