Industry Survey of Wafer Fab Reticle Control Quality Strategies

Reticle quality control in wafer fabs is different from quality control in mask shops. As such an industrywide survey was undertaken to benchmark different strategies and approaches taken. This paper summarizes the results while retaining the different wafer fabs' anonymity and confidentiality. The approach taken for the survey was specifically designed to be impartial and independent of any tools, solutions or applications available from KLA-Tencor.