Analysis of Size Effect of Nano Scale Machining Based on Normal Stress and Indentation Theories

Recently nano meter size pattern (sub-micro scale) can be machined mechanically using a diamond tool. Many studies have found a ‘size effect’ which referred to a specific cutting energy increase with the decrease in the uncut chip thickness at micro scale machining. A new analysis method was suggested in order to observe ‘size effect’ in nano scale machining and to verify the cause of the ‘size effect’ in this study. The diamond tool was indented to a vertical depth of 1,000nm depth in order to simplify the stress state and the normal force was measured continuously. The tip rounding was measured quantitatively by AFM. Based on the measurements and theoretical analysis, it was verified that the main cause of the ‘size effect’ in nano scale machining is geometrically necessary dislocations, one of the intrinsic material characteristics. st before tool failure.