The chemical basis of the CHO phase diagram in diamond plasma depositions

Abstract The chemical origin of the CHO phase diagram of diamond plasma deposition methods has been presented. According to the suggested chemical reactions, in almost all C-H-O-gas-containing plasmas the principal reactions begin with carbon removal by oxygen to the very stable CO. The rest of the gases during diamond deposition can be regarded as basically the same with the first successful diamond plasma consisting of a few per cent of hydrocarbons diluted in hydrogen gas. The suggested reactions result in successful diamond depositions only above the HCO line in the CHO phase diagram.