Progress in the Development of SAW Resonator Pressure Transducers

The dual oscillator SAW resonator pressure sensor is a promising candidate for high performance, moderate cost pressure s ensor applications. The design, fabrication, packaging and circuitry of this device are described, with particular emphasis on recent design modifications aimed at improving overall sensor performance and reducing cost. Temperature compensation techniques and the benefits of using high Q SAW resonators for improved device stability are discussed. A simple t heory for sensor operation is presented and detailed information concerning sensor design is included. Experimental sensor data illustrating frequency output v ersus pressure, p ressure sensitivity, nonlinearity, hysteresis and thermal sensitivity are presented.