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Fabrication of Recessed-Gate AlGaN/GaN Hemts Utilizing Contactless Photo-Electrochemical (CL-PEC) Etching
Fabrication of Recessed-Gate AlGaN/GaN Hemts Utilizing Contactless Photo-Electrochemical (CL-PEC) Etching
2020
Masachika Toguchi
Kazuki Miwa
Fumimasa Horikiri
Noboru Fukuhara
Yoshinobu Narita
Osamu Ichikawa
Ryota Isono
Takeshi Tanaka
Taketomo Sato
Keywords:
Fabrication
Materials science
Optoelectronics
algan gan
Electrochemistry
Etching
Correction
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